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OGIWARA, Toshiya
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Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting
Description/Abstract:
We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:
Auger depth profiling analysis
,
GaAs/AlAs multilayer
,
non-negative least-square curve fit
, and
peak separation
Material/Specimen:
GaAs/AlAs multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
Description/Abstract:
It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:
Auger Depth Profiling Analysis
,
Argon Ion Spot Beam
, and
InP/GaInAsP Multilayer Specimen
Material/Specimen:
InP/GaInAsP Multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
,
HARADA, Tomoko
, and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
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Keyword
Auger depth profiling analysis
11
HfO2/Si
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Ultra low angle incidence ion beam
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InP/GaInAsP multilayer specimens
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Argon Ion Spot Beam
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Japanese
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National Institute for Materials Science
7
Surface Science Society of Japan
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Rights Statement Sim
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spectroscopy
8
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InP/GaInAsP multilayer specimens
2
GaAs/AlAs multilayer
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InP/GaInAsP Multilayer
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Author
OGIWARA, Toshiya
[remove]
12
NAGATA, Takahiro
8
YOSHIKAWA, Hideki
8
TANUMA, Shigeo
4
HARADA, Tomoko
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Journal of The Surface Science Society of Japan
4