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Tanuma, Shigeo
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1.
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Description/Abstract:
We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
08/09/2021
Date Modified:
08/09/2021
2.
Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range
Description/Abstract:
We have calculated inelastic mean free paths (IMFPs) for 41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K,Sc,T...
Keyword:
electron inelastic mean free paths
,
IMFP
,
elemental solids
, and
TPP-2M
Material/Specimen:
elemental solids
Resource Type:
Article
Author:
Tanuma, Shigeo
,
Powell, C. J.
, and
Penn, D. R.
Journal:
SURFACE AND INTERFACE ANALYSIS
Date Uploaded:
01/11/2021
Date Modified:
16/12/2021
3.
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
Description/Abstract:
半球型電子分光器を搭載したオージェ電子分光装置では,傾斜ホルダーを用いると装置のジオ メトリー特性との関係からイオン及び一次電子の入射角の自由度が大きくなる.特に試料回転の 回転軸が一次電子の入射方向と一致する場合は,傾斜ホルダーの回転角によってイオン入射角を 設定でき,電...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice
and
Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of Surface Analysis
Date Uploaded:
14/06/2021
Date Modified:
18/06/2021
4.
Calculations of electron inelastic mean free paths. XII. Data for 42 inorganic compounds over the 50 eV to 200 keV range with the full Penn algorithm
Description/Abstract:
We have calculated inelastic mean free paths (IMFPs) for 42 inorganic compounds (AgBr, AgCl, AgI, Al2O3, AlAs, AlN, AlSb, cubic BN, hexa...
Keyword:
Electron Inelastic Mean Free Path
,
IMFP
, and
TPP-2M
Resource Type:
Article
Author:
Shinotsuka, Hiroshi
,
Tanuma, Shigeo
,
Powell, Cedric J.
, and
Penn, Dave R.
Journal:
Surface and Interface Analysis
Date Uploaded:
26/06/2020
Date Modified:
08/07/2021
5.
Calculations of Electron Inelastic Mean Free Paths (IMFPs). XIV. Calculated IMFPs for LiF and Si3N4 and Development of an Improved Predictive IMFP Formula
Description/Abstract:
We report inelastic mean free paths (IMFPs) of Si3N4 and LiF for electron energies from 50 eV to 200 keV that were calculated from their ...
Keyword:
IMFP
,
Improved Predictive IMFP Formula
,
JTP equation
,
TPP-2M
, and
electron inelastic mean free path
Resource Type:
Article
Author:
Jablonski, Aleksander
,
Tanuma, Shigeo
, and
Powell, C. Cedric
Journal:
Surface and Interface Analysis
Date Uploaded:
29/05/2023
Date Modified:
06/06/2023
6.
InP/GaInAs多層膜のAES深さ方向分析のラウンドロビン試験報告(I)
Description/Abstract:
AES深さ方向分析の標準化を進めるために,InP/GaInAs多層膜を用いたデプスプロファイル測定のラウンドロビン試験を行った.参加した23機関の装置は3社に分類され,その仕様が異なるため,測定条件は電子線およびイオンの加速電圧を3kVに固定して,その他の条件は各機関に一任...
Keyword:
Auger Depth Profiling Analysis
,
InP/GaInAs Specimen
, and
Round Robin Test
Material/Specimen:
InP/GaInAs Multilayer
Resource Type:
Article
Author:
Ogiwara, Toshiya
and
Tanuma, Shigeo
Journal:
Journal of Surface Analysis
Date Uploaded:
29/07/2021
Date Modified:
02/08/2021
7.
Calculation of Electron Inelastic Mean Free Paths (IMFPs). VII. Reliability of the TPP-2M IMFP Predictive Equation
Description/Abstract:
We report comparisons of electron inelastic mean free paths (IMFPs) determined from our predictive IMFP equation TPP-2M and reference IMF...
Keyword:
electron inelastic mean free paths
,
IMFP
,
IMFPs
,
TPP-2M
,
number of valence electrons
,
elemental solids
, and
surface sensitivity
Resource Type:
Article
Author:
Tanuma, Shigeo
,
Powell, C. J.
, and
Penn, D. R.
Journal:
SURFACE AND INTERFACE ANALYSIS
Date Uploaded:
01/11/2021
Date Modified:
04/01/2022
8.
Experimental Determination of Electron Inelastic Mean Free Paths in 13 Elemental Solids in the 50 eV to 5000 eV Energy Range by Elastic-Peak Electron Spectroscopy
Description/Abstract:
We have determined electron inelastic mean free paths (IMFPs) in C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au by elasti...
Keyword:
electron inelastic mean free paths
,
experimental determination
,
elastic- peak electron spectroscopy
, and
Monte Carlo simulation
Material/Specimen:
C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au
Resource Type:
Article
Author:
Tanuma, Shigeo
,
Shiratori, T
,
Kimura, Takashi
,
Goto, Keisuke
,
Ichimura, Shingo
, and
Powell, Cedric J
Journal:
SURFACE AND INTERFACE ANALYSIS
Date Uploaded:
04/10/2021
Date Modified:
18/10/2021
9.
Calculations of Electron Inelastic Mean Free Paths. XI. Data for Liquid Water for Energies from 50 eV to 30 keV
Description/Abstract:
We calculated electron inelastic mean free paths (IMFPs) for liquid water from its optical energy-loss function (ELF) for electron energi...
Keyword:
EAL
,
Electron Inelastic Mean Free Path
,
IMFP
,
effective attenuation length
,
liquid water
,
relativistic TPP-2M
,
relativistic full Penn algorithm
, and
static structure factor
Resource Type:
Article
Author:
Shinotsuka, Hiroshi
,
Da, Bo
,
Tanuma, Shigeo
,
Yoshikawa, Hideki
,
Powell , Cedric J
, and
Penn, David R
Journal:
Surface and Interface Analysis
Date Uploaded:
31/07/2020
Date Modified:
02/07/2021
10.
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
Description/Abstract:
We have investigated the Auger depth profiling analysis of InP/GaInAsP multilayer specimens. It is difficult to obtain the Auger depth pr...
Keyword:
Auger Depth Profiling Analysis
,
InP/GaInAsP Multilayers
,
Zalar Rotation Method
, and
Sample Cooling Method
Material/Specimen:
InP/GaInAsP Multilayers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Tanuma, Shigeo
,
Nagasawa, Yuji
, and
Ikeo, Nobuyuki
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
09/09/2021
Date Modified:
09/09/2021
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IMFP
7
Auger Depth Profiling Analysis
6
electron inelastic mean free paths
5
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English
9
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8
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1
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Surface Analysis Society of Japan
6
Wiley
6
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1
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18
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In Copyright
8
Creative Commons BY-NC Attribution-NonCommercial 4.0 International
6
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
4
Material/Specimen
C (graphite), Si, Cr, Fe, Cu, Zn, Ga, Mo, Ag, Ta, W, Pt and Au
1
26-n-paraffin
1
GaAs
1
GaAs/AlAs Superlattice
1
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
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Date accepted
2002
1
2004
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2021
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Author
Tanuma, Shigeo
[remove]
18
Ogiwara, Toshiya
7
Shinotsuka, Hiroshi
4
Penn, D. R.
3
Powell, C. J.
3
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https://creativecommons.org/licenses/by-nc-nd/4.0/
4
Journal
Journal of Surface Analysis
6
SURFACE AND INTERFACE ANALYSIS
4
Surface and Interface Analysis
4
Journal of The Surface Science Society of Japan
2
Journal of Electron Spectroscopy and Related Phenomena
1
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