Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

論文

著者

OGIWARA, Toshiya ; TANUMA, Shigeo

キーワード

peak separation, non-negative least-square curve fit, Auger depth profiling analysis, GaAs/AlAs multilayer

刊行年月日

2011-06-10

更新時刻

2022-10-03 01:51:43 +0900