Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs
- プロシーディングス論文
- 著者
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;Ryo Tanaka (author) (この著者で検索)Fuji Electric Co., Ltd.;Shinya Takashima (author) (この著者で検索)Fuji Electric Co., Ltd.;Katsunori Ueno (author) (この著者で検索)Fuji Electric Co., Ltd.;Masahiro Horita (author) (この著者で検索)Nagoya Univ.;Jun Suda (author) (この著者で検索)Nagoya Univ.Jun Uzuhashi (author) (この著者で検索)National Institute for Materials Science
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Tadakatsu Ohkubo (author) (この著者で検索)National Institute for Materials Science
;
Masaharu Edo (author) (この著者で検索)Fuji Electric Co., Ltd. - キーワード
- gallium nitride, atom probe tomography, transmission electron microscopy
- 刊行年月日
- 2023-06-08
- 更新時刻
- 2024-04-19 12:30:23 +0900
Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography
- ジャーナル論文
- 著者
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Akira Uedono (author) (この著者で検索)
https://orcid.org/0000-0001-6224-4869
(unauthenticated)
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Claudia Fleischmann (author) (この著者で検索)
https://orcid.org/0000-0003-1531-6916
(unauthenticated)
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;Jean-Philippe Soulié (author) (この著者で検索);Mustafa Ayyad (author) (この著者で検索)Jeroen E. Scheerder (author) (この著者で検索)
https://orcid.org/0000-0002-9301-0392
(unauthenticated)
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;Christoph Adelmann (author) (この著者で検索)Jun Uzuhashi (author) (この著者で検索)
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Tadakatsu Ohkubo (author) (この著者で検索)
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Koji Michishio (author) (この著者で検索)
https://orcid.org/0000-0003-1381-7856
(unauthenticated)
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;Nagayasu Oshima (author) (この著者で検索)Shoji Ishibashi (author) (この著者で検索)
https://orcid.org/0000-0002-4896-3530
(unauthenticated)
- キーワード
- atom probe tomography, positron annihilation
- 刊行年月日
- 2024-07-10
- 更新時刻
- 2025-07-10 08:30:19 +0900
Electrical activity of Mg clustering at nanoscale defects induced by N ion implantation in GaN
- ジャーナル論文
- 著者
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;Kosuke Ishikawa (author) (この著者で検索)Emi Kano (author) (この著者で検索)
https://orcid.org/0000-0001-6134-4980
(unauthenticated)
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Jun Uzuhashi (author) (この著者で検索)
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;Kensuke Sumida (author) (この著者で検索)Tetsuo Narita (author) (この著者で検索)
https://orcid.org/0000-0002-0849-360X
(unauthenticated)
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Masahiro Horita (author) (この著者で検索)
https://orcid.org/0000-0003-0008-6732
(unauthenticated)
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;Junya Sahashi (author) (この著者で検索)Shun Lu (author) (この著者で検索)
https://orcid.org/0000-0002-7342-757X
(unauthenticated)
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Jun Suda (author) (この著者で検索)
https://orcid.org/0000-0002-5453-4943
(unauthenticated)
;
Tadakatsu Ohkubo (author) (この著者で検索)
;
Tetsu Kachi (author) (この著者で検索)
https://orcid.org/0000-0002-4300-5720
(unauthenticated)
;
Nobuyuki Ikarashi (author) (この著者で検索)
https://orcid.org/0000-0002-5575-5780
(unauthenticated)
- キーワード
- gallium nitride, atom probe tomography
- 刊行年月日
- 2026-06-22
- 更新時刻
- 2026-06-25 09:46:49 +0900