Auger Depth Profiling Analyses of InP/GaInAsP Multilayers

ジャーナル論文

著者

OGIWARA, Toshiya (author) (この著者で検索)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

OGIWARA, Toshiya ;

TANUMA, Shigeo (author) (この著者で検索)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

TANUMA, Shigeo

キーワード

argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis

刊行年月日

2011-06-10

更新時刻

2022-10-03 02:01:29 +0900