キーワード: etching
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2 件のレコードが見つかりました。

paper.pdf
Formation of GaN mesas with reverse-tapered edge structures on a lattice-matched AlInN layer for a positive beveled edge termination
ジャーナル論文
著者
Takayoshi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Masataka Imura (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Next-generation Semiconductor Group
ORCID SAMURAI ;
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
GaN, AlInN, etching, positive bevel edge termination
刊行年月日
2024-08-01
更新時刻
2024-08-02 12:30:52 +0900
Clean manuscript(211010).pdf
Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching
ジャーナル論文
著者
Yuichi Oshima (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Shingo Yagyu (author) (この著者で検索)
;
Takashi Shinohe (author) (この著者で検索)
キーワード
α-Ga2O3, dislocation, etching
刊行年月日
2021-10-19
更新時刻
2024-01-22 09:38:31 +0900