High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
- ジャーナル論文
- 著者
-
Tanuma, Shigeo (author) (この著者で検索)
;
Ogiwara, Toshiya (author) (この著者で検索)
;
Kim, Kyung Joong (author) (この著者で検索)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
;
Nagatomi, Takaharu (author) (この著者で検索)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
- キーワード
- Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
- 刊行年月日
- 2016-04-03
- 更新時刻
- 2024-01-05 22:13:47 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
- ジャーナル論文
- 著者
-
Ogiwara, Toshiya (author) (この著者で検索)
;
Tanuma, Shigeo (author) (この著者で検索)
;
;Nagasawa, Yuji (author) (この著者で検索)Ikeo, Nobuyuki (author) (この著者で検索)
- キーワード
- Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, Sample Cooling Method
- 刊行年月日
- 2011-06-10
- 更新時刻
- 2022-10-03 01:53:08 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
- ジャーナル論文
- 著者
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OGIWARA, Toshiya (author) (この著者で検索)
;
;HARADA, Tomoko (author) (この著者で検索)TANUMA, Shigeo (author) (この著者で検索)
- キーワード
- Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam
- 刊行年月日
- 2011-06-10
- 更新時刻
- 2022-10-03 02:04:45 +0900
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
- ジャーナル論文
- 著者
-
Ogiwara, Toshiya (author) (この著者で検索)
;
Nagatomi, Takaharu (author) (この著者で検索)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
;
Kim, Kyung Joong (author) (この著者で検索)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
;
Tanuma, Shigeo (author) (この著者で検索)
- キーワード
- Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
- 刊行年月日
- 2011-10-24
- 更新時刻
- 2024-01-05 22:14:10 +0900
English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
- ジャーナル論文
- 著者
-
Ogiwara, Toshiya (author) (この著者で検索)
;
Nagata, Takahiro (author) (この著者で検索)
;
Yoshikawa, Hideki (author) (この著者で検索)
- キーワード
- Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
- 刊行年月日
- 2020-06-04
- 更新時刻
- 2022-10-03 01:48:14 +0900