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論文(14)
データセット(8)
キーワード
Auger depth profiling analysis (11)
HfO2/Si (10)
Auger Depth Profiling Analysis (9)
Ultra low angle incidence ion beam (8)
Ultra Low Angle Incidence Ion Beam (3)
GaAs/AlAs Superlattice (2)
InP/GaInAsP multilayer specimens (2)
Inclined Holder (2)
Sample Cooling Method (2)
Si/Ge multiple delta-doped layers (2)
(more)
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In Copyright (9)
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application/pdf (22)
application/zip (8)
22 件のレコードが見つかりました。
Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:13:20 +0900
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-04-07 22:57:41 +0900
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:41 +0900
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-10-08 12:20:27 +0900
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:38 +0900
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:25 +0900
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:25 +0900
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya
;
NAGATA, Takahiro
;
YOSHIKAWA, Hideki
キーワード
Auger depth profiling analysis
,
HfO2/Si
,
Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:11:29 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
論文
著者
OGIWARA, Toshiya
;
TANUMA, Shigeo
キーワード
depth resolution function
,
InP/GaInAsP multilayer specimens
,
Auger depth profiling analysis
,
surface roughness
,
atomic force microscope
刊行年月日
2011-06-10
更新時刻
2022-10-03 01:24:02 +0900
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
論文
著者
OGIWARA, Toshiya
;
TANUMA, Shigeo
キーワード
argon ion sputtering
,
InP/GaInAsP multilayer specimens
,
Auger depth profiling analysis
刊行年月日
2011-06-10
更新時刻
2022-10-03 02:01:29 +0900
キーワード
Auger depth profiling analysis
(11)
HfO2/Si
(10)
Auger Depth Profiling Analysis
(9)
Ultra low angle incidence ion beam
(8)
Ultra Low Angle Incidence Ion Beam
(3)
GaAs/AlAs Superlattice
(2)
InP/GaInAsP multilayer specimens
(2)
Inclined Holder
(2)
Sample Cooling Method
(2)
Si/Ge multiple delta-doped layers
(2)
argon ion sputtering
(2)
Argon Ion Spot Beam
(1)
Auger Depth Profiling analysis
(1)
Depth Resolution
(1)
FeNi/CoFeB/FeNi Thin Film
(1)
GaAs/AlAs multilayer
(1)
InP/GaInAs Specimen
(1)
InP/GaInAsP Multilayer Specimen
(1)
InP/GaInAsP Multilayers
(1)
InP/GaInAsP多層膜
(1)
Round Robin Test
(1)
Sample Temperature
(1)
SiO2/Si
(1)
Zalar Rotation Method
(1)
atomic force microscope
(1)
compound semiconductor
(1)
depth resolution function
(1)
non-negative least-square curve fit
(1)
peak separation
(1)
surface observation using a scanning electron microscope
(1)
surface roughness
(1)
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