キーワード: MEMS
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5 件のレコードが見つかりました。

041124_1_5.0250902-min.pdf
High-order resonance enhancing the mass sensitivity of diamond cantilevers
ジャーナル論文
著者
Wen Zhao (author) (この著者で検索)
ORCID ;
Guo Chen (author) (この著者で検索)
ORCID ;
Keyun Gu (author) (この著者で検索)
ORCID ;
Masaya Toda (author) (この著者で検索)
; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-04-01
更新時刻
2025-07-12 08:30:35 +0900
Zhang_MEMS2025_202415-submit.docx
Diamond MEMS Magnetic Force Sensor Toward Femtonewton at Room Temperature
プロシーディングス論文
著者
Zilong Zhang (author) (この著者で検索)
;
Zhijian Zhao (author) (この著者で検索)
; ORCID SAMURAI ;
Takahito Ono (author) (この著者で検索)
;
Masaya Toda (author) (この著者で検索)
キーワード
Diamond, MEMS, magnetic sensors
刊行年月日
2025-01-19
更新時刻
2025-11-13 16:30:04 +0900
Abstract Oxygen-termination effect R.doc
Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS
プレゼンテーション
著者
Keyun Gu (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Zilong Zhang (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID ;
Wen Zhao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Guo Chen (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
;
Jian Huang (author) (この著者で検索)
China University of Geosciences
;
Satoshi Koizumi (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI ;
Yasuo Koide (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials
ORCID SAMURAI ;
Meiyong Liao (author) (この著者で検索)
National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group
ORCID SAMURAI
キーワード
ダイヤモンド, MEMS
刊行年月日
更新時刻
2025-04-12 08:30:28 +0900
5 Uploaded Manuscript__WEN-DRM.docx
Frequency stability improvement of single-crystal diamond cantilever utilizing higher-order-mode excitation
ジャーナル論文
著者
Wen Zhao (author) (この著者で検索)
;
Guo Chen (author) (この著者で検索)
;
Zhaozong Zhang (author) (この著者で検索)
ORCID ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Diamond, MEMS
刊行年月日
2025-06-26
更新時刻
2025-07-11 16:30:21 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
ジャーナル論文
著者
ORCID SAMURAI
キーワード
Ga2O3, TMAH, wet etching, MEMS
刊行年月日
2025-11-01
更新時刻
2025-11-27 08:30:13 +0900