Keyword: Si/Ge multiple delta-doped layers
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2 records found.

表面科学_32_2011_664.pdf
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Article
Creator
Ogiwara, Toshiya SAMURAI ORCID ; Nagatomi, Takaharu ORCID ; Kim, Kyung Joong ORCID ; Tanuma, Shigeo SAMURAI ORCID
Keyword
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
Date published
2011-10-24
Updated at
2024-01-05 22:14:10 +0900
JSA_Vol18_No3_174.pdf
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
Article
Creator
Tanuma, Shigeo SAMURAI ORCID ; Ogiwara, Toshiya SAMURAI ORCID ; Kim, Kyung Joong ORCID ; Nagatomi, Takaharu ORCID
Keyword
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
Date published
2016-04-03
Updated at
2024-01-05 22:13:47 +0900