InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性

Article

Creator

Ogiwara, Toshiya ; Tanuma, Shigeo

Keyword

Auger Depth Profiling Analysis, Depth Resolution, Sample Temperature, InP/GaInAsP多層膜

Date published

1995-05-17

Updated at

2022-10-03 01:44:22 +0900