2 records found.
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
- Article
- Creator
-
Ogiwara, Toshiya
;
Tanuma, Shigeo
;
Nagasawa, Yuji
;
Ikeo, Nobuyuki
- Keyword
- Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, Sample Cooling Method
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 01:53:08 +0900
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
- Article
- Creator
-
Ogiwara, Toshiya
;
Tanuma, Shigeo
- Keyword
- Auger Depth Profiling Analysis, SiO2/Si, Sample Cooling Method
- Date published
- 1996-02-08
- Updated at
- 2022-10-03 01:39:59 +0900