Keyword: InP/GaInAsP multilayer specimens
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2 records found.

表面科学_17_1996_758.pdf
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Article
Creator
OGIWARA, Toshiya SAMURAI ORCID ; TANUMA, Shigeo SAMURAI ORCID
Keyword
depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
Date published
2011-06-10
Updated at
2022-10-03 01:24:02 +0900
表面科学_17_1996_38.pdf
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Article
Creator
OGIWARA, Toshiya SAMURAI ORCID ; TANUMA, Shigeo SAMURAI ORCID
Keyword
argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis
Date published
2011-06-10
Updated at
2022-10-03 02:01:29 +0900