Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway

Article

Creator

Yuhao Shi ; Masatake Tsuji ; Hanjun Cho ; Shigenori Ueda ; Junghwan Kim ; Hideo Hosono

Keyword

oxide semiconductors, IGZO, thin-film transistors, contact resistance, palladium, hydrogen

Date published

2024-04-02

Updated at

2024-04-08 16:30:22 +0900