試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析

Article

Creator

Ogiwara, Toshiya ; Tanuma, Shigeo

Keyword

Auger Depth Profiling Analysis, SiO2/Si, Sample Cooling Method

Date published

1996-02-08

Updated at

2022-10-03 01:39:59 +0900