2 records found.
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
- Journal article
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)
;
TANUMA, Shigeo (author) (Search by this author)
- Keyword
- depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 01:24:02 +0900
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
- Journal article
- Creator
-
OGIWARA, Toshiya (author) (Search by this author)
;
TANUMA, Shigeo (author) (Search by this author)
- Keyword
- argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis
- Date published
- 2011-06-10
- Updated at
- 2022-10-03 02:01:29 +0900