Resource type: journal_article Keyword: Ga2O3
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26 records found.

article.pdf
Tetramethylammonium hydroxide (TMAH) treatment of dry-etched trenches on (010) β-Ga2O3 to enhance trench profiles
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH
Date published
2026-02-01
Updated at
2026-02-25 12:30:03 +0900
J_Appl_Phys_139_075302_(2026).pdf
Halide vapor phase epitaxy of a thick c -plane α-Ga2O3 film on a high-quality α-Cr2O3/sapphire template
Article
Creator
Yuichi Oshima SAMURAI ORCID ; Takayoshi Oshima SAMURAI ORCID ; Shiyu Xiao ORCID ; Kazuto Murakami ; Katsuhiro Imai ; Takahiro Tomita
Keyword
Ga2O3, HVPE, Cr2O3
Date published
2026-02-21
Updated at
2026-02-18 16:30:15 +0900
jjap_65_3_038003-1.pdf
Mapping primary crystallographic planes in β -Ga 2 O 3 based on a pseudo-cubic oxygen sublattice
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, fcc
Date published
2026-02-16
Updated at
2026-02-18 16:30:08 +0900
Rapid homoepitaxial growth of 011 -Ga2O3 by HCl-based halide vapor phase epitaxy.pdf
Rapid homoepitaxial growth of (011) β-Ga 2 O 3 by HCl-based halide vapor phase epitaxy
Article
Creator
Yuichi Oshima SAMURAI ORCID ; Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, HVPE
Date published
2025-12-31
Updated at
2025-11-28 08:30:04 +0900
Oshima_2025_Appl._Phys._Express_18_116501-1.pdf
Fabrication of β -Ga 2 O 3 /air-gap structures on (010) β -Ga 2 O 3 by wet etching in tetramethylammonium hydroxide (TMAH)
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH, wet etching, MEMS
Date published
2025-11-01
Updated at
2025-11-27 08:30:13 +0900
HCl-gas etching behavior of 001 -Ga2O3 under oxygen supply.pdf
HCl-gas etching of (001) β-Ga2O3 under oxygen supply
Article
Creator
Yuichi Oshima SAMURAI ORCID ; Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, etching, plasma-free
Date published
2025-12-31
Updated at
2025-09-04 12:30:19 +0900
Physica Status Solidi b - 2025 - Penman - Comparative Study of the Optical Properties of ‐ ‐ and ‐Ga2O3.pdf
Comparative Study of the Optical Properties of α‐, β‐, and κ‐Ga2O3
Article
Creator
Lewis T. Penman ORCID ; Zak M. Johnston ; Paul R. Edwards ORCID ; Yuichi Oshima SAMURAI ORCID ; Clifford McAleese ; Piero Mazzolini ORCID ; Matteo Bosi ORCID ; Luca Seravalli ORCID ; Roberto Fornari ; Robert W. Martin ORCID ; Fabien C.‐P. Massabuau ORCID
Keyword
Ga2O3
Date published
2025-02-12
Updated at
2025-08-18 16:30:52 +0900
jjap_64_8_088001.pdf
Step-and-terrace surface formation on (001) β-Ga2O3 by wet etching using 2.38 wt% tetramethylammonium hydroxide (TMAH) lithographic developer
Article
Creator
Takayoshi Oshima SAMURAI ORCID
Keyword
Ga2O3, TMAH, Wet etching
Date published
2025-08-01
Updated at
2025-08-18 16:30:36 +0900
EB_alpha-GO_240422-2HQ(clean).pdf
Epitaxial Lateral Overgrowth of c-plane α-Ga2O3 using a stripe mask with ultra-narrow windows
Article
Creator
Yuichi Oshima SAMURAI ORCID ; Takashi Shinohe
Keyword
Ga2O3, dislocation, HVPE, ELO
Date published
2025-05-19
Updated at
2025-05-21 16:30:09 +0900
055207_1_5.0260753-2-8.pdf
Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching
Article
Creator
Takayoshi Oshima SAMURAI ORCID ; Yuichi Oshima SAMURAI ORCID
Keyword
Ga2O3, HCl gas etching, air bridge
Date published
2025-05-01
Updated at
2025-05-07 12:30:22 +0900