Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs
- Conference paper
- Creator
-
;Ryo Tanaka (author) (Search by this author)Fuji Electric Co., Ltd.;Shinya Takashima (author) (Search by this author)Fuji Electric Co., Ltd.;Katsunori Ueno (author) (Search by this author)Fuji Electric Co., Ltd.;Masahiro Horita (author) (Search by this author)Nagoya Univ.;Jun Suda (author) (Search by this author)Nagoya Univ.Jun Uzuhashi (author) (Search by this author)National Institute for Materials Science
;
Tadakatsu Ohkubo (author) (Search by this author)National Institute for Materials Science
;
Masaharu Edo (author) (Search by this author)Fuji Electric Co., Ltd. - Keyword
- gallium nitride, atom probe tomography, transmission electron microscopy
- Date published
- 2023-06-08
- Updated at
- 2024-04-19 12:30:23 +0900
Atomic-scale observation of native oxides on c - and m -faced GaN surfaces
- Journal article
- Creator
-
Jun Uzuhashi (author) (Search by this author)
;
Yoshihiro Irokawa (author) (Search by this author)
;
Toshihide Nabatame (author) (Search by this author)
;
;Yasuo Koide (author) (Search by this author)Tadakatsu Ohkubo (author) (Search by this author)
- Keyword
- transmission electron microscopy, gallium nitride
- Date published
- 2026-04-01
- Updated at
- 2026-04-02 10:10:21 +0900
Acceptor activation of Mg-doped GaN—Effects of N2/O2 vs N2 as ambient gas during annealing
- Journal article
- Creator
-
Ashutosh Kumar (author) (Search by this author)
https://orcid.org/0000-0002-8085-1598
(unauthenticated)
National Institute for Materials Science
;
;Martin Berg (author) (Search by this author);Qin Wang (author) (Search by this author)Jun Uzuhashi (author) (Search by this author)National Institute for Materials Science
;
Tadakatsu Ohkubo (author) (Search by this author)National Institute for Materials Science
;
;Michael Salter (author) (Search by this author)Peter Ramvall (author) (Search by this author) - Keyword
- gallium nitride, scanning transmission electron microscopy, semiconductor, activation
- Date published
- 2023-07-21
- Updated at
- 2024-01-05 22:12:15 +0900
Vacancy‐Type Defects and Their Trapping/Detrapping of Charge Carriers in Ion‐Implanted GaN Studied by Positron Annihilation
- Journal article
- Creator
-
Akira Uedono (author) (Search by this author)
https://orcid.org/0000-0001-6224-4869
(unauthenticated)
;
Ryo Tanaka (author) (Search by this author)
https://orcid.org/0000-0002-4058-7649
(unauthenticated)
;
Shinya Takashima (author) (Search by this author)
https://orcid.org/0000-0002-3212-4521
(unauthenticated)
;
;Katsunori Ueno (author) (Search by this author);Masaharu Edo (author) (Search by this author)Kohei Shima (author) (Search by this author)
https://orcid.org/0000-0003-0967-141X
(unauthenticated)
;
Shigefusa F. Chichibu (author) (Search by this author)
https://orcid.org/0000-0001-9558-1642
(unauthenticated)
;
Jun Uzuhashi (author) (Search by this author)
;
Tadakatsu Ohkubo (author) (Search by this author)
;
Shoji Ishibashi (author) (Search by this author)
https://orcid.org/0000-0002-4896-3530
(unauthenticated)
;
Kacper Sierakowski (author) (Search by this author)
https://orcid.org/0000-0002-9447-1182
(unauthenticated)
;
Michal Bockowski (author) (Search by this author)
https://orcid.org/0000-0003-1616-685X
(unauthenticated)
- Keyword
- gallium nitride
- Date published
- 2024-02-29
- Updated at
- 2025-03-01 12:30:45 +0900
Electrical activity of Mg clustering at nanoscale defects induced by N ion implantation in GaN
- Journal article
- Creator
-
;Kosuke Ishikawa (author) (Search by this author)Emi Kano (author) (Search by this author)
https://orcid.org/0000-0001-6134-4980
(unauthenticated)
;
Jun Uzuhashi (author) (Search by this author)
;
;Kensuke Sumida (author) (Search by this author)Tetsuo Narita (author) (Search by this author)
https://orcid.org/0000-0002-0849-360X
(unauthenticated)
;
Masahiro Horita (author) (Search by this author)
https://orcid.org/0000-0003-0008-6732
(unauthenticated)
;
;Junya Sahashi (author) (Search by this author)Shun Lu (author) (Search by this author)
https://orcid.org/0000-0002-7342-757X
(unauthenticated)
;
Jun Suda (author) (Search by this author)
https://orcid.org/0000-0002-5453-4943
(unauthenticated)
;
Tadakatsu Ohkubo (author) (Search by this author)
;
Tetsu Kachi (author) (Search by this author)
https://orcid.org/0000-0002-4300-5720
(unauthenticated)
;
Nobuyuki Ikarashi (author) (Search by this author)
https://orcid.org/0000-0002-5575-5780
(unauthenticated)
- Keyword
- gallium nitride, atom probe tomography
- Date published
- 2026-06-22
- Updated at
- 2026-06-25 09:46:49 +0900