Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
- Journal article
- Creator
-
Ogiwara, Toshiya (author) (Search by this author)
;
Nagatomi, Takaharu (author) (Search by this author)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
;
Kim, Kyung Joong (author) (Search by this author)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
;
Tanuma, Shigeo (author) (Search by this author)
- Keyword
- Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
- Date published
- 2011-10-24
- Updated at
- 2024-01-05 22:14:10 +0900
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
- Journal article
- Creator
-
Tanuma, Shigeo (author) (Search by this author)
;
Ogiwara, Toshiya (author) (Search by this author)
;
Kim, Kyung Joong (author) (Search by this author)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
;
Nagatomi, Takaharu (author) (Search by this author)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
- Keyword
- Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
- Date published
- 2016-04-03
- Updated at
- 2024-01-05 22:13:47 +0900