2 records found.
Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self‐Recognition Algorithms
- Journal article
- Creator
-
;Zilong Zhang (author) (Search by this author);Keyun Gu (author) (Search by this author);Guo Chen (author) (Search by this author);Liwen Sang (author) (Search by this author)Tokuyuki Teraji (author) (Search by this author)
;
Yasuo Koide (author) (Search by this author)
;
Satoshi Koizumi (author) (Search by this author)
;
;Masaya Toda (author) (Search by this author)Meiyong Liao (author) (Search by this author)
- Keyword
- Diamond, MEMS
- Date published
- 2024-04-30
- Updated at
- 2025-04-30 12:30:06 +0900
Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products
- Journal article
- Creator
-
;Guo Chen (author) (Search by this author)Zilong Zhang (author) (Search by this author)National Institute for Materials Science
;
;Keyun Gu (author) (Search by this author)Liwen Sang (author) (Search by this author)National Institute for Materials Science
;
Satoshi Koizumi (author) (Search by this author)National Institute for Materials Science
;
;Masaya Toda (author) (Search by this author);Haitao Ye (author) (Search by this author)Yasuo Koide (author) (Search by this author)National Institute for Materials Science
;
;Zhaohui Huang (author) (Search by this author)Meiyong Liao (author) (Search by this author)National Institute for Materials Science
- Keyword
- Diamond, MEMS
- Date published
- 2024-02-01
- Updated at
- 2024-08-31 08:30:32 +0900