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説明:

Nearly all sensors inevitably suffer from environmental influence such as temperature fluctuation. To precisely process the external signals, independent temperature compensation devices or electronic circuits are usually required, making the overall system and algorithms sophisticated. Especially, when the environment temperature is as high as over 200 °C, both the sensors and temperature-compensation devices encounter the reliability problem. In this work, an intelligent multifunctional sensor utilizing single-crystal diamond (SCD) microelectromechanical (MEMS) resonators is demonstrated that can sense both magnetic fields and temperatures up to 300 °C, independently. The strategy is to integrate a magnetostrictive thin film and a non-magnetic thin film on different diamond MEMS resonators on the same diamond chip for simultaneous magnetic field sensing and temperature monitoring, respectively. The multi-resonators based on diamond MEMS offer a promising platform for multi-parameter sensing immune to environment interference.

権利情報:

• In Copyright
  This is the peer reviewed version of the following article: Zhang, Z., Gu, K., Chen, G., Sang, L., Teraji, T., Koide, Y., ... & Liao, M. (2024). Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self‐Recognition Algorithms. Advanced Materials Technologies, 2400153., which has been published in final form at https://doi.org/10.1002/admt.202400153 This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.

キーワード: Diamond, MEMS

刊行年月日: 2024-04-30

出版者: Wiley

掲載誌:

• Advanced Materials Technologies (ISSN: 2365709X) vol. 9 issue. 13 2400153

研究助成金:

• Kementerian Pendidikan
• Ministry of Education, Culture, Sports, Science and Technology

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4591

公開URL: https://doi.org/10.1002/admt.202400153

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更新時刻: 2025-04-30 12:30:06 +0900

MDRでの公開時刻: 2025-04-30 08:24:02 +0900