@misc{zilong2024a, title = {Highly Reliable Diamond MEMS Dual Sensor for Magnetic Fields and Temperatures with Self‐Recognition Algorithms}, author = {Zilong Zhang, Keyun Gu, Guo Chen, Liwen Sang, Tokuyuki Teraji, Yasuo Koide, Satoshi Koizumi, Masaya Toda, Meiyong Liao}, publisher = {Wiley}, year = {2024-04-30}, keywords = {Diamond, MEMS} }