論文 Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

Guo Chen ; Zilong Zhang ORCID (National Institute for Materials Science) ; Keyun Gu ; Liwen Sang ORCID (National Institute for Materials Science) ; Satoshi Koizumi SAMURAI ORCID (National Institute for Materials Science) ; Masaya Toda ; Haitao Ye ; Yasuo Koide SAMURAI ORCID (National Institute for Materials Science) ; Zhaohui Huang ; Meiyong Liao SAMURAI ORCID (National Institute for Materials Science)

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Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao. Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products. Applied Physics Express. 2024, 17 (2), 021001. https://doi.org/10.35848/1882-0786/ad2027
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説明:

(abstract)

MEMS resonant sensing devices require both HF (f) and low dissipation or high quality factor (Q) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 1012 Hz by higher-order resonances in single-crystal diamond cantilevers.

権利情報:

キーワード: Diamond, MEMS

刊行年月日: 2024-02-01

出版者: IOP Publishing

掲載誌:

  • Applied Physics Express (ISSN: 18820786) vol. 17 issue. 2 021001

研究助成金:

  • Japan Society for the Promotion of Science 20H02212

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.35848/1882-0786/ad2027

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更新時刻: 2024-08-31 08:30:32 +0900

MDRでの公開時刻: 2024-08-31 08:30:32 +0900

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