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説明:

MEMS resonant sensing devices require both HF (f) and low dissipation or high quality factor (Q) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 1012 Hz by higher-order resonances in single-crystal diamond cantilevers.

権利情報:

• Creative Commons BY Attribution 4.0 International
  

キーワード: Diamond, MEMS

刊行年月日: 2024-02-01

出版者: IOP Publishing

掲載誌:

• Applied Physics Express (ISSN: 18820786) vol. 17 issue. 2 021001

研究助成金:

• Japan Society for the Promotion of Science 20H02212

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.35848/1882-0786/ad2027

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更新時刻: 2024-08-31 08:30:32 +0900

MDRでの公開時刻: 2024-08-31 08:30:32 +0900