@misc{guo2024a,
  title = {Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products},
  author = {Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao},
  publisher = {IOP Publishing},
  year = {2024-02-01},
  keywords = {Diamond, MEMS}
}