Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

Guo Chen; Zilong Zhang; Keyun Gu; Liwen Sang; Satoshi Koizumi; Masaya Toda; Haitao Ye; Yasuo Koide; Zhaohui Huang; Meiyong Liao

doi:10.35848/1882-0786/ad2027

Article Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

Guo Chen ; Zilong Zhang (National Institute for Materials Science) ; Keyun Gu ; Liwen Sang (National Institute for Materials Science) ; Satoshi Koizumi (National Institute for Materials Science) ; Masaya Toda ; Haitao Ye ; Yasuo Koide (National Institute for Materials Science) ; Zhaohui Huang ; Meiyong Liao (National Institute for Materials Science)

Chen_2024_Appl._Phys._Express_17_021001.pdf

Download file (1.19 MB)
Download as zip (1.02 MB)

Collection

Citation

Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao. Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products. Applied Physics Express. 2024, 17 (2), 021001. https://doi.org/10.35848/1882-0786/ad2027

(BibTeX)

Description:

(abstract)

MEMS resonant sensing devices require both HF (f) and low dissipation or high quality factor (Q) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q product at higher orders. The third order resonance exhibits an approximately 15-fold increase in f‧Q product, while the Q factor remains nearly constant. Consequently, we achieved an ultrahigh f‧Q product exceeding 1012 Hz by higher-order resonances in single-crystal diamond cantilevers.

Rights: