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Resource type
Journal article(2)
Keyword
contact resistance (2)
2D field-effect transistors (1)
IGZO (1)
WSe2 (1)
hydrogen (1)
oxide semiconductors (1)
palladium (1)
thin-film transistors (1)
(more)
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Creative Commons BY Attribution 4.0 International (2)
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application/pdf (2)
Keyword: contact resistance
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Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway
Journal article
Creator
Yuhao Shi
(author) (
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https://orcid.org/0000-0002-7956-193X
(unauthenticated)
Yuhao Shi
;
Masatake Tsuji
(author) (
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)
https://orcid.org/0000-0002-3404-6037
(unauthenticated)
Masatake Tsuji
;
Hanjun Cho
(author) (
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https://orcid.org/0009-0009-2834-8846
(unauthenticated)
Hanjun Cho
;
Shigenori Ueda
(author) (
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https://orcid.org/0000-0001-9425-0614
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Shigenori Ueda
;
Junghwan Kim
(author) (
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)
https://orcid.org/0000-0001-9168-6260
(unauthenticated)
Junghwan Kim
;
Hideo Hosono
(author) (
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)
https://orcid.org/0000-0001-9260-6728
National Institute for Materials Science
NIMS Researchers Directory SAMURAI
Hideo Hosono
Keyword
oxide semiconductors
,
IGZO
,
thin-film transistors
,
contact resistance
,
palladium
,
hydrogen
Date published
2024-04-02
Updated at
2024-04-08 16:30:22 +0900
Locally Doped Transferred Contacts for WSe
2
Transistors
Journal article
Creator
He-Yu Chen
(author) (
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)
https://orcid.org/0009-0004-7101-9179
(unauthenticated)
He-Yu Chen
;
Jheng-Jie Lin
(author) (
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)
https://orcid.org/0009-0002-1263-9453
(unauthenticated)
Jheng-Jie Lin
;
Sheng-Shong Wong
(author) (
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)
Sheng-Shong Wong
;
Zhen-You Lin
(author) (
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)
Zhen-You Lin
;
Yu-Chiang Hsieh
(author) (
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)
https://orcid.org/0009-0001-3346-9548
(unauthenticated)
Yu-Chiang Hsieh
;
Kuo-En Chang
(author) (
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)
Kuo-En Chang
;
Chung-Lin Wu
(author) (
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)
Chung-Lin Wu
;
Kenji Watanabe
(author) (
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)
https://orcid.org/0000-0003-3701-8119
NIMS Researchers Directory SAMURAI
Kenji Watanabe
;
Takashi Taniguchi
(author) (
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)
https://orcid.org/0000-0002-1467-3105
NIMS Researchers Directory SAMURAI
Takashi Taniguchi
;
Tse-Ming Chen
(author) (
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)
Tse-Ming Chen
;
Luke W. Smith
(author) (
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)
https://orcid.org/0000-0003-2194-4708
(unauthenticated)
Luke W. Smith
Keyword
2D field-effect transistors
,
contact resistance
,
WSe2
Date published
2024-11-26
Updated at
2025-02-05 16:30:33 +0900
Keyword
contact resistance
(2)
2D field-effect transistors
(1)
IGZO
(1)
WSe2
(1)
hydrogen
(1)
oxide semiconductors
(1)
palladium
(1)
thin-film transistors
(1)
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Collection
Resource type
Journal article(2)
Keyword
contact resistance (2)
2D field-effect transistors (1)
IGZO (1)
WSe2 (1)
hydrogen (1)
oxide semiconductors (1)
palladium (1)
thin-film transistors (1)
(more)
License
Creative Commons BY Attribution 4.0 International (2)
File type
application/pdf (2)