Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

Article

Creator

OGIWARA, Toshiya ; TANUMA, Shigeo

Keyword

peak separation, non-negative least-square curve fit, Auger depth profiling analysis, GaAs/AlAs multilayer

Date published

2011-06-10

Updated at

2022-10-03 01:51:43 +0900