Reduction of dislocation density in α-Ga2O3 epilayers via rapid growth at low temperatures by halide vapor phase epitaxy

ジャーナル論文

著者

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Hiroyuki Ando (author) (この著者で検索)

Hiroyuki Ando ;

Takashi Shinohe (author) (この著者で検索)

Takashi Shinohe

キーワード

α-Ga2O3, dislocation, HVPE

刊行年月日

2023-06-01

更新時刻

2024-06-23 08:30:11 +0900