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HfO2-Fig12-Work-20230803.pdf
Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:13:20 +0900
HfO2-Fig11-Work-20230710.pdf
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-04-07 22:57:41 +0900
HfO2-Fig10-Work-20230606.pdf
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:41 +0900
HfO2-Fig9-Work-20230518.pdf
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-10-08 12:20:27 +0900
HfO2-Fig5-Work-20230419.pdf
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:38 +0900
HfO2-Fig6-Work-20230118.pdf
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:25 +0900
HfO2-Fig7-Work-20221213.pdf
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:25 +0900
HfO2-Fig8-Work-20220304-2.pdf
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:11:29 +0900
H. Che et al., J. Vac. Sci. Technol. A 44, 030402 (2026).pdf
Effects of oxidant selection for atomic layer deposition on impurity removal and crystallinity of as-grown Hf1− x Zr x O2 thin films
ジャーナル論文
著者
Haoming Che (author) (この著者で検索)
;
Takashi Onaya (author) (この著者で検索)
National Institute for Materials Science
ORCID ;
Atsushi Tamura (author) (この著者で検索)
;
Masaki Ishii (author) (この著者で検索)
;
Hiroshi Taka (author) (この著者で検索)
;
Koji Kita (author) (この著者で検索)
キーワード
atomic layer deposition, ferroelectric HfO2-based thin films, oxidant, low temperature fabrication process
刊行年月日
2026-05-01
更新時刻
2026-07-14 10:27:45 +0900
Optical properties of hafnium-dioxide derived from reflection electron energy loss spectroscopy spectra (1).pdf
Optical properties of hafnium-dioxide derived from reflection electron energy loss spectroscopy spectra
ジャーナル論文
著者
J.M. Gong (author) (この著者で検索)
;
X. Liu (author) (この著者で検索)
;
L.H. Yang (author) (この著者で検索)
;
A. Sulyok (author) (この著者で検索)
;
Z. Baji (author) (この著者で検索)
;
V. Kis (author) (この著者で検索)
;
K. Tőkési (author) (この著者で検索)
;
R.G. Zeng (author) (この著者で検索)
;
G.J. Fang (author) (この著者で検索)
;
J.B. Gong (author) (この著者で検索)
;
X.D. Xiao (author) (この著者で検索)
;
B. Da (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
Z.J. Ding (author) (この著者で検索)
キーワード
optical data
刊行年月日
2024-07-28
更新時刻
2024-12-07 12:30:14 +0900
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