4 records found.
Near-vertical plasma-free HCl gas etching on (011) β-Ga2O3
- Article
- Creator
-
Takayoshi Oshima
;
Yuichi Oshima
- Keyword
- Ga2O3, crystallographic etching, (011)
- Date published
- 2025-01-01
- Updated at
- 2026-01-24 15:43:35 +0900
Fully vertical AlN-on-SiC Schottky barrier diodes
- Article
- Creator
-
Hironori Okumura
;
Masataka Imura
;
Fuga Miyazawa
;
Lorenzo Mainini
- Keyword
- AlN, 4H-SiC, Schottky barrier diodes
- Date published
- 2024-10-01
- Updated at
- 2025-10-21 15:50:30 +0900
Epitaxial relationship of NiO on (-102) β-Ga2O3
- Article
- Creator
-
Takayoshi Oshima
;
Shinji Nakagomi
- Keyword
- Ga2O3, NiO, epitaxial relationship
- Date published
- 2023-12-01
- Updated at
- 2024-11-23 16:30:35 +0900
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography
- Article
- Creator
-
Takayoshi Oshima
- Keyword
- Ga2O3, lithography
- Date published
- 2023-01-01
- Updated at
- 2024-01-24 11:20:15 +0900