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表面科学_32_2011_664.pdf
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Journal article
Creator
ORCID SAMURAI ;
Nagatomi, Takaharu (author) (Search by this author)
ORCID ;
Kim, Kyung Joong (author) (Search by this author)
ORCID ; ORCID SAMURAI
Keyword
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
Date published
2011-10-24
Updated at
2024-01-05 22:14:10 +0900
JSA_Vol18_No3_174.pdf
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
Journal article
Creator
ORCID SAMURAI ; ORCID SAMURAI ;
Kim, Kyung Joong (author) (Search by this author)
ORCID ;
Nagatomi, Takaharu (author) (Search by this author)
ORCID
Keyword
Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
Date published
2016-04-03
Updated at
2024-01-05 22:13:47 +0900