File type: application/pdf Keyword: Auger depth profiling analysis
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11 records found.

HfO2-Fig12-Work-20230803.pdf
Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-01-05 22:13:20 +0900
HfO2-Fig11-Work-20230710.pdf
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-04-07 22:57:41 +0900
HfO2-Fig10-Work-20230606.pdf
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-01-05 22:12:41 +0900
HfO2-Fig9-Work-20230518.pdf
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-10-08 12:20:27 +0900
HfO2-Fig5-Work-20230419.pdf
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-03-30 18:50:38 +0900
HfO2-Fig6-Work-20230118.pdf
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-03-30 18:50:25 +0900
HfO2-Fig7-Work-20221213.pdf
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-01-05 22:12:25 +0900
HfO2-Fig8-Work-20220304-2.pdf
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Dataset
Creator
OGIWARA, Toshiya SAMURAI ORCID ; NAGATA, Takahiro SAMURAI ORCID ; YOSHIKAWA, Hideki SAMURAI ORCID
Keyword
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
Date published
2019-03-07
Updated at
2024-01-05 22:11:29 +0900
表面科学_17_1996_758.pdf
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Article
Creator
OGIWARA, Toshiya SAMURAI ORCID ; TANUMA, Shigeo SAMURAI ORCID
Keyword
depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope
Date published
2011-06-10
Updated at
2022-10-03 01:24:02 +0900
表面科学_17_1996_38.pdf
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Article
Creator
OGIWARA, Toshiya SAMURAI ORCID ; TANUMA, Shigeo SAMURAI ORCID
Keyword
argon ion sputtering, InP/GaInAsP multilayer specimens, Auger depth profiling analysis
Date published
2011-06-10
Updated at
2022-10-03 02:01:29 +0900