Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
- ジャーナル論文
- 著者
-
Ogiwara, Toshiya (author) (この著者で検索)
;
Nagatomi, Takaharu (author) (この著者で検索)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
;
Kim, Kyung Joong (author) (この著者で検索)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
;
Tanuma, Shigeo (author) (この著者で検索)
- キーワード
- Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
- 刊行年月日
- 2011-10-24
- 更新時刻
- 2024-01-05 22:14:10 +0900
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
- ジャーナル論文
- 著者
-
Tanuma, Shigeo (author) (この著者で検索)
;
Ogiwara, Toshiya (author) (この著者で検索)
;
Kim, Kyung Joong (author) (この著者で検索)
https://orcid.org/0000-0001-5559-9784
(unauthenticated)
;
Nagatomi, Takaharu (author) (この著者で検索)
https://orcid.org/0000-0002-3629-638X
(unauthenticated)
- キーワード
- Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder
- 刊行年月日
- 2016-04-03
- 更新時刻
- 2024-01-05 22:13:47 +0900