Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

Journal article

Creator

OGIWARA, Toshiya (author) (Search by this author)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

OGIWARA, Toshiya ;

TANUMA, Shigeo (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

TANUMA, Shigeo

Keyword

peak separation, non-negative least-square curve fit, Auger depth profiling analysis, GaAs/AlAs multilayer

Date published

2011-06-10

Updated at

2022-10-03 01:51:43 +0900