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Resource type
Journal article(2)
Keyword
air bridge (2)
Ga2O3 (1)
HCl gas etching (1)
MEMS (1)
cantilever (1)
β-Ga2O3 (1)
(more)
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Creative Commons BY Attribution 4.0 International (2)
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Keyword: air bridge
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2 records found.
Fabrication of β-Ga
2
O
3
/air-gap structures on (001) β-Ga
2
O
3
using HCl gas etching
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
β-Ga2O3
,
cantilever
,
air bridge
,
MEMS
Date published
2025-12-31
Updated at
2025-09-04 12:30:25 +0900
Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching
Journal article
Creator
Takayoshi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8550-9735
NIMS Researchers Directory SAMURAI
Takayoshi Oshima
;
Yuichi Oshima
(author) (
Search by this author
)
https://orcid.org/0000-0001-8293-4891
NIMS Researchers Directory SAMURAI
Yuichi Oshima
Keyword
Ga2O3
,
HCl gas etching
,
air bridge
Date published
2025-05-01
Updated at
2025-05-07 12:30:22 +0900
Keyword
air bridge
(2)
Ga2O3
(1)
HCl gas etching
(1)
MEMS
(1)
cantilever
(1)
β-Ga2O3
(1)
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