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Resource type
Journal article(2)
Keyword
Auger Depth Profiling Analysis (2)
Sample Cooling Method (2)
InP/GaInAsP Multilayers (1)
SiO2/Si (1)
Zalar Rotation Method (1)
(more)
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application/pdf (2)
Keyword: Sample Cooling Method
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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
Journal article
Creator
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Tanuma, Shigeo
(author) (
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)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
;
Nagasawa, Yuji
(author) (
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)
Nagasawa, Yuji
;
Ikeo, Nobuyuki
(author) (
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Ikeo, Nobuyuki
Keyword
Auger Depth Profiling Analysis
,
InP/GaInAsP Multilayers
,
Zalar Rotation Method
,
Sample Cooling Method
Date published
2011-06-10
Updated at
2022-10-03 01:53:08 +0900
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析
Journal article
Creator
Ogiwara, Toshiya
(author) (
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)
https://orcid.org/0000-0002-7376-6571
NIMS Researchers Directory SAMURAI
Ogiwara, Toshiya
;
Tanuma, Shigeo
(author) (
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)
https://orcid.org/0000-0003-2628-9941
NIMS Researchers Directory SAMURAI
Tanuma, Shigeo
Keyword
Auger Depth Profiling Analysis
,
SiO2/Si
,
Sample Cooling Method
Date published
1996-02-08
Updated at
2022-10-03 01:39:59 +0900
Keyword
Auger Depth Profiling Analysis
(2)
Sample Cooling Method
(2)
InP/GaInAsP Multilayers
(1)
SiO2/Si
(1)
Zalar Rotation Method
(1)
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Collection
Resource type
Journal article(2)
Keyword
Auger Depth Profiling Analysis (2)
Sample Cooling Method (2)
InP/GaInAsP Multilayers (1)
SiO2/Si (1)
Zalar Rotation Method (1)
(more)
License
File type
application/pdf (2)