Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

ジャーナル論文

著者

OGIWARA, Toshiya (author) (この著者で検索)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

OGIWARA, Toshiya ;

TANUMA, Shigeo (author) (この著者で検索)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

TANUMA, Shigeo

キーワード

peak separation, non-negative least-square curve fit, Auger depth profiling analysis, GaAs/AlAs multilayer

刊行年月日

2011-06-10

更新時刻

2022-10-03 01:51:43 +0900