Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction

Journal article

Creator

Yuichi Oshima (author) (Search by this author)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Elaheh Ahmadi (author) (Search by this author)

Elaheh Ahmadi ;

Stefan C. Badescu (author) (Search by this author)

Stefan C. Badescu ;

Feng Wu (author) (Search by this author)

Feng Wu ;

James S. Speck (author) (Search by this author)

James S. Speck

Keyword

β-Ga2O3, composition, atom probe

Date published

2016-06-01

Updated at

2024-01-24 09:26:50 +0900