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Single-crystal diamond (SCD) microelectromechanical systems (MEMS) resonators with lower energy dissipation and higher quality (Q) factors have always been pursued for the development of high-sensitivity and high signal-to-noise ratio (SNR) MEMS sensors. The intrinsic loss such as the crystal quality and extrinsic loss of clamping loss have been examined to improve the Q factors of SCD MEMS resonators. Nevertheless, the surface termination induced energy dissipation has rarely been known due to the lack of high crystal quality diamond resonators and in-situ characterization. Here we examine the effect of oxygen-termination on the surface energy dissipation of SCD cantilevers by in-situ heating these cantilevers in a high vacuum chamber. After thermal treatment of the cantilevers at 933 K, the Q factor of the cantilever is improved from 2.8x105 to 3.3x105 (i.e. the 120 μm-long). The resonance frequency increase confirms the desorption of surface adsorbates. Compared to silicon, on which a native solid-state oxide exists, the surface oxygen-termination induced loss in diamond MEMS is much smaller. The non-existence of native oxides on diamond surface is an obvious merit toward ultra-high Q factor MEMS resonators.

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• In Copyright
  

Keyword: Diamond, MEMS, sensors

Date published: 2024-04-18

Publisher: Elsevier BV

Journal:

• Carbon (ISSN: 00086223) vol. 225 119159

Funding:

• Japan Society for the Promotion of Science 22K18957
• Japan Society for the Promotion of Science 15H03999
• Japan Society for the Promotion of Science 24H00287
• Ministry of Education, Culture, Sports, Science and Technology JPMXP1223NM5297
• Chinese Academy of Sciences
• China Scholarship Council 202306890007

Manuscript type: Author's original (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4586

First published URL: https://doi.org/10.1016/j.carbon.2024.119159

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Updated at: 2024-07-09 12:30:27 +0900

Published on MDR: 2024-07-09 12:30:27 +0900