@misc{keyun2024a,
  title = {Oxygen-termination effect on the surface energy dissipation in diamond MEMS},
  author = {Keyun Gu, Zilong Zhang, Guo Chen, Jian Huang, Yasuo Koide, Satoshi Koizumi, Wen Zhao, Meiyong Liao},
  publisher = {Elsevier BV},
  year = {2024-04-18},
  keywords = {Diamond, MEMS, sensors}
}