Download file (887 KB)
Download as zip (847 KB)

Collection

Citation

Description:

The automatization of the atom probe tomography (APT) tip preparation using a focused ion beam (FIB) with a scanning electron microscopy (SEM) dual-beam system will certainly contribute to systematic APT research with higher throughput and reliability. While our previous work established a method to prepare tips with a specified tip curvature and taper angle automatically by using script-controlled FIB/SEM, the technique has been expanded to automated “site-specific” tip preparation in the current work. The improved procedure can automatically detect not only the tip shape but also the interface position in the tip, thus, the new function allows for control of the tip apex position, in other words, automated “site-specific” tip preparations are possible. The details of the automation procedure and some experimental demonstrations, i.e., Pt cap on Si, InGaN-based MQWs, and p-n junction of GaAs, are presented.

Rights:

• In Copyright
  

  This is a pre-copyedited, author-produced version of an article accepted for publication in Microscopy and Microanalysis following peer review. The version of record Uzuhashi, J., Ohkubo, T., & Hono, K. (2024). An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy. Microscopy and Microanalysis, ozae015 is available online at: https://doi.org/10.1093/mam/ozae015

Keyword: atom probe tomography, focused ion beam, scanning electron microscopy

Date published: 2025-02-03

Publisher: Oxford University Press (OUP)

Journal:

• Microscopy and Microanalysis (ISSN: 14319276)

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4588

First published URL: https://doi.org/10.1093/mam/ozae015

Related item:

Other identifier(s):

Contact agent:

Updated at: 2024-09-05 08:30:18 +0900

Published on MDR: 2024-09-05 08:30:19 +0900