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説明:

The automatization of the atom probe tomography (APT) tip preparation using a focused ion beam (FIB) with a scanning electron microscopy (SEM) dual-beam system will certainly contribute to systematic APT research with higher throughput and reliability. While our previous work established a method to prepare tips with a specified tip curvature and taper angle automatically by using script-controlled FIB/SEM, the technique has been expanded to automated “site-specific” tip preparation in the current work. The improved procedure can automatically detect not only the tip shape but also the interface position in the tip, thus, the new function allows for control of the tip apex position, in other words, automated “site-specific” tip preparations are possible. The details of the automation procedure and some experimental demonstrations, i.e., Pt cap on Si, InGaN-based MQWs, and p-n junction of GaAs, are presented.

権利情報:

• In Copyright
  This is a pre-copyedited, author-produced version of an article accepted for publication in Microscopy and Microanalysis following peer review. The version of record Uzuhashi, J., Ohkubo, T., & Hono, K. (2024). An Automated Site-Specific Tip Preparation Method for Atom Probe Tomography Using Script-Controlled Focused Ion Beam/Scanning Electron Microscopy. Microscopy and Microanalysis, ozae015 is available online at: https://doi.org/10.1093/mam/ozae015

キーワード: atom probe tomography, focused ion beam, scanning electron microscopy

刊行年月日: 2025-02-03

出版者: Oxford University Press (OUP)

掲載誌:

• Microscopy and Microanalysis (ISSN: 14319276)

研究助成金:

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4588

公開URL: https://doi.org/10.1093/mam/ozae015

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更新時刻: 2024-09-05 08:30:18 +0900

MDRでの公開時刻: 2024-09-05 08:30:19 +0900