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説明:

ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. This article provides a brief summary of this International Standard.

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キーワード: XPS, quantitative surface analysis, X-ray photoelectron spectroscopy, Auger electron spectroscopy, relative sensitivity factor, ISO, International Organization for Standardization, AES

刊行年月日: 2005-12-28

出版者: Wiley

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研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.1446

公開URL: https://doi.org/10.1002/sia.2177

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更新時刻: 2024-01-05 22:11:34 +0900

MDRでの公開時刻: 2021-08-13 01:19:58 +0900