Journal article Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
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TANUMA, Shigeo. Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials. https://doi.org/10.1002/sia.2177

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ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. This article provides a brief summary of this International Standard.

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Keyword: XPS, quantitative surface analysis, X-ray photoelectron spectroscopy, Auger electron spectroscopy, relative sensitivity factor, ISO, International Organization for Standardization, AES

Date published: 2005-12-28

Publisher: Wiley

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Manuscript type: Not a journal article

MDR DOI: https://doi.org/10.48505/nims.1446

First published URL: https://doi.org/10.1002/sia.2177

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Updated at: 2024-01-05 22:11:34 +0900

Published on MDR: 2021-08-13 01:19:58 +0900

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