@misc{tanuma2005a, title = {Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials}, author = {TANUMA, Shigeo}, publisher = {Wiley}, year = {2005-12-28}, keywords = {XPS, quantitative surface analysis, X-ray photoelectron spectroscopy, Auger electron spectroscopy, relative sensitivity factor, ISO, International Organization for Standardization, AES} }