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Filtering by: Material/Specimen InP/GaInAsP Multilayer Remove constraint Material/Specimen: InP/GaInAsP Multilayer

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Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spect...

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Type of work

Publication1

Keyword

Argon Ion Spot Beam1
Auger Depth Profiling Analysis1
InP/GaInAsP Multilayer Specimen1

Language

Japanese1

Publisher

Surface Science Society of Japan1

Resource type

Article1

Visibility

open1

Rights Statement Sim

In Copyright1

Material/Specimen

InP/GaInAsP Multilayer[remove]1

Author

HARADA, Tomoko1
OGIWARA, Toshiya1
TANUMA, Shigeo1

Journal

Journal of The Surface Science Society of Japan1

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