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peak separation
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Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting
Description/Abstract:
We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:
Auger depth profiling analysis
,
GaAs/AlAs multilayer
,
non-negative least-square curve fit
, and
peak separation
Material/Specimen:
GaAs/AlAs multilayer
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
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Keyword
Auger depth profiling analysis
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GaAs/AlAs multilayer
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non-negative least-square curve fit
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peak separation
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Language
Japanese
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1
Publisher
Surface Science Society of Japan
1
Resource type
Article
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open
1
Rights Statement Sim
In Copyright
1
Material/Specimen
GaAs/AlAs multilayer
1
Author
OGIWARA, Toshiya
1
TANUMA, Shigeo
1
Journal
Journal of The Surface Science Society of Japan
1