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compound semiconductor
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Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
Description/Abstract:
各種化合物半導体の表面をArイオンでスパッタリングして,その表面のSEM観察を行なった.そして,イオンスパッタリング時の試料温度および試料回転の有無と表面形状の関係を系統的に調べた.その結果,表面あれはスパッタリングされた表面全体に生成する場合とコーン状の突起物がランダムに...
Keyword:
compound semiconductor
,
surface observation using a scanning electron microscope
, and
argon ion sputtering
Material/Specimen:
InP
,
InSb
,
InAs
,
GaAs
,
GaSb
, and
GaP
Resource Type:
Article
Author:
Ogiwara, Toshiya
and
Tanuma, Shigeo
Journal:
Journal of Surface Analysis
Date Uploaded:
28/05/2021
Date Modified:
04/06/2021
First-principles calculations of optical constants
Description/Abstract:
The energy loss function (ELF) describes the interaction between electrons and matter in solids. It is essential for understanding quanti...
Keyword:
compound semiconductor
,
energy loss function
,
first-principles calculation
, and
optical constant
Resource Type:
Dataset
Data origin:
simulations
Author:
SHINOTSUKA, Hiroshi
,
YOSHIKAWA, Hideki
, and
TANUMA, Shigeo
Journal:
e-Journal of Surface Science and Nanotechnology
Date Uploaded:
18/01/2021
Date Modified:
07/07/2021
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Keyword
compound semiconductor
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argon ion sputtering
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energy loss function
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first-principles calculation
1
optical constant
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Japanese
1
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Surface Analysis Society of Japan
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open
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Rights Statement Sim
Creative Commons BY Attribution 4.0 International
1
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Computational methods
density functional theory or electronic structure
1
Data origin
simulations
1
Properties addressed
electrical -- dielectric constant and spectra
1
optical
1
Material/Specimen
GaAs
1
GaP
1
GaSb
1
InAs
1
InP
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Author
Ogiwara, Toshiya
1
SHINOTSUKA, Hiroshi
1
TANUMA, Shigeo
1
Tanuma, Shigeo
1
YOSHIKAWA, Hideki
1
Journal
Journal of Surface Analysis
1
e-Journal of Surface Science and Nanotechnology
1