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Arイオンスパッタリングされた各種化合物半導体表面のSEM観察

Description/Abstract:

各種化合物半導体の表面をArイオンでスパッタリングして，その表面のSEM観察を行なった．そして，イオンスパッタリング時の試料温度および試料回転の有無と表面形状の関係を系統的に調べた．その結果，表面あれはスパッタリングされた表面全体に生成する場合とコーン状の突起物がランダムに...

Keyword:

compound semiconductor, surface observation using a scanning electron microscope, and argon ion sputtering

Material/Specimen:

InP, InSb, InAs, GaAs, GaSb, and GaP

Resource Type:

Article

Author:

Ogiwara, Toshiya and Tanuma, Shigeo

Journal:

Journal of Surface Analysis

Date Uploaded:

28/05/2021

Date Modified:

04/06/2021
First-principles calculations of optical constants

Description/Abstract:

The energy loss function (ELF) describes the interaction between electrons and matter in solids. It is essential for understanding quanti...

Keyword:

compound semiconductor, energy loss function, first-principles calculation, and optical constant

Resource Type:

Dataset

Data origin:

simulations

Author:

SHINOTSUKA, Hiroshi, YOSHIKAWA, Hideki, and TANUMA, Shigeo

Journal:

e-Journal of Surface Science and Nanotechnology

Date Uploaded:

18/01/2021

Date Modified:

07/07/2021