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Auger Depth Profiling Analyses of InP/GaInAsP Multilayers

Description/Abstract:

We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...

Keyword:

Auger depth profiling analysis, InP/GaInAsP multilayer specimens, and argon ion sputtering

Material/Specimen:

InP/GaInAsP multilayer specimens

Resource Type:

Article

Author:

OGIWARA, Toshiya and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021
Arイオンスパッタリングされた各種化合物半導体表面のSEM観察

Description/Abstract:

各種化合物半導体の表面をArイオンでスパッタリングして，その表面のSEM観察を行なった．そして，イオンスパッタリング時の試料温度および試料回転の有無と表面形状の関係を系統的に調べた．その結果，表面あれはスパッタリングされた表面全体に生成する場合とコーン状の突起物がランダムに...

Keyword:

compound semiconductor, surface observation using a scanning electron microscope, and argon ion sputtering

Material/Specimen:

InP, InSb, InAs, GaAs, GaSb, and GaP

Resource Type:

Article

Author:

Ogiwara, Toshiya and Tanuma, Shigeo

Journal:

Journal of Surface Analysis

Date Uploaded:

28/05/2021

Date Modified:

04/06/2021